Linear integrators are well known for their ability to counter static forces and improve low-frequency disturbance rejection properties in control systems. However, linear integrators introduce phase lag, which is a frequency-dependent time shift or delay. Since the early introduction of the Clegg integrator, nonlinear integrators have held the promise of providing phase advantages over linear integrators. For five currently known nonlinear integrators, an overview is provided of recent developments in stage motion control. Benchmark examples are taken from the industrial practice of wafer scanners, which form the pivotal machines used in the manufacturing of computer chips.
Autonomous Systems. THE NEXT BIG THING.